JEOL JSM-5610LV

Scanning Electron Microscope

Image of JEOL LV-5610 SEM

Techniques

Optical Imaging
BF
DF
Extended Depth of Field
(EDF) Imaging
Live Video Recording
Polarization Techniques
Specimen Heating/Cooling 120°C/-5°C

Scheduler

FORCE

BASIC SPECIFICATIONS

High vacuum mode (HV)

  • Resolution (SEI, accelerating voltage 30 kV, WD 6mm): 5.0 nm
  • Magnification: 25x to 300,000x
  • Image modes: SEI, BEI
  • Probe current: 1pA to 1uA

Low vacuum mode (LV)

  • Resolution (BEI, Accelerating voltage 30 kV, WD 8 mm): 10 nm
  • Chamber pressure: 10 to 270 Pa
  • Lowest pressure: 1Pa
  • Image mode: Three kinds of BEI (Composition image, Topographic image and Shaded image)
  • Electron gun: Accelerating voltage: 0.5 to 30 kV
  • Filament: Tungsten hairpin filament
  • Alignment: Electromagnetic 2-stage deflection type
  • Manual and auto gun alignment
  • Beam blanking
  • Motorized X,Y control
  • Manual Z, Tilt, rotation
  • Maximum Specimen size: 6 inch (152mm)

We recommend using Hitachi style Accessories, since they can be used on both of the SEMs.